• 专利标题:   Synchronous doping method in chemical vapor deposition graphene growth process involves doping trace elements on surface of copper foil, carrying out annealing to form substrate, transferring substrate into furnace, adding reaction gas to enable carbon, gradually depositing and growing on substrate.
  • 专利号:   CN114540945-A
  • 发明人:   ZHANG L, YANG G, ZHENG Y, LUO G, TU R, ZHANGCHI T
  • 专利权人:   GUANGDONG LAB CHEM FINE CHEM CHAOZHOU
  • 国际专利分类:   C23C014/16, C23C014/35, C23C014/58, C30B025/00, C30B029/02
  • 专利详细信息:   CN114540945-A 27 May 2022 C30B-025/00 202260 Chinese
  • 申请详细信息:   CN114540945-A CN10086116 25 Jan 2022
  • 优先权号:   CN10086116

▎ 摘  要

NOVELTY - A synchronous doping method in a chemical vapor deposition (CVD) graphene growth process involves (s1) preparing a substrate, performing doping element deposition on the surface of a copper foil to deposit trace elements on the surface to form a doping element film, and carrying out high-temperature annealing to obtain a copper alloy foil with uniform texture as the substrate, (s2) transferring the substrate into a normal pressure CVD growth furnace, introducing protective gas to enable a reaction area of the normal pressure CVD growth furnace to be in protective atmosphere, heating the furnace, raising the temperature of the reaction zone, adding the reaction gas to enable carbon element in the reaction gas to gradually depositing and growing on the substrate and obtaining the doped graphene. USE - Synchronous doping method in chemical vapor deposition graphene growth process. ADVANTAGE - The synchronous doping method is simple, easy to control and has excellent repeatability.