• 专利标题:   Hybrid interconnect structure for use in electronic device, has interfacial bonding layer formed between non-metallic material layer and graphene layer or metal and graphene layers, where bonding layer is formed with metallic material.
  • 专利号:   US2017092592-A1, US9761532-B2
  • 发明人:   SHIN K, SHIN H, KIM C, LEE C, PARK S, SONG H
  • 专利权人:   SAMSUNG ELECTRONICS CO LTD
  • 国际专利分类:   H01L023/528, H01L023/532, H01L023/495
  • 专利详细信息:   US2017092592-A1 30 Mar 2017 H01L-023/532 201726 Pages: 30 English
  • 申请详细信息:   US2017092592-A1 US083827 29 Mar 2016
  • 优先权号:   KR137086

▎ 摘  要

NOVELTY - The structure has a graphene layer (851) formed between a non-metallic material layer and a metal layer. The graphene layer connects the non-metallic material layer and the metal layer. An interfacial bonding layer is formed between the non-metallic material layer and the graphene layer, or the metal layer and the graphene layer. A bonding layer (841, 843, 844) is formed with metallic material, where the non-metallic material layer is one of a semiconductor substrate (801) and a semiconductor material layer on the substrate. USE - Hybrid interconnect structure for use in an electronic device. ADVANTAGE - The structure reduces specific resistance by inserting graphene between actual wiring structures of a multi-stack structure. The structure reduces resistance of the bonding layer and the metal layer, thus reducing total resistance of the structure. DESCRIPTION OF DRAWING(S) - The drawing shows a cross sectional view of a semiconductor device as an electronic device employing a hybrid interconnect structure. Semiconductor substrate (801) Bonding layers (841, 843, 844) Graphene layer (851) Spacer (870) Insulating layer (880)