• 专利标题:   Method for growing laterally doped silicon carbide structure, involves reacting second graphene template with silicon source in laterally adjacent portion of first silicon carbide structure to produce second doped silicon carbide structure.
  • 专利号:   CN107749393-A
  • 发明人:   LIU X, SHEN Z, YAN G, WEN Z, CHEN J, WANG L, ZHAO W, ZHANG F, SUN G, ZENG Y
  • 专利权人:   INST SEMICONDUCTORS CHINESE ACAD SCI
  • 国际专利分类:   H01L021/02
  • 专利详细信息:   CN107749393-A 02 Mar 2018 H01L-021/02 201819 Pages: 11 Chinese
  • 申请详细信息:   CN107749393-A CN10913890 29 Sep 2017
  • 优先权号:   CN10913890

▎ 摘  要

NOVELTY - The method involves reacting the first graphene template with a silicon source to produce a first silicon carbide structure of a first doping type. The second graphene template is reacted with the silicon source in the laterally adjacent portion of the first silicon carbide structure to produce a second doped silicon carbide structure, and the first graphene template and the second graphene template are complementary to each other in one of the partial region of the same plane. A first graphene template is prepared or transferred on a substrate. USE - Method for growing laterally doped silicon carbide structure. ADVANTAGE - The method can prepare atomic layer thickness low-dimensional silicon carbide semiconductor material with lateral PN structure. The method is simple, easy to implement, easy to be popularized, and has good popularization and application prospects. DESCRIPTION OF DRAWING(S) - The drawing shows a flowchart illustrating a method for growing a laterally doped silicon carbide structure. (Drawing includes non-English language text) Step for cleaning the silicon carbide substrate (A) Step for preparing p-type graphene template on the crystal face of a silicon carbide substrate (B) Step for reacting the silicon source gas with the graphene material of the p-type graphene template on the silicon carbide substrate (C) Step for removing the silicon structure accompanying the growth during the p-type silicon carbide structure on the silicon carbide substrate between the graphene templates, and leaving the p-type silicon carbide structure (D) Step for preparing a second graphene template on the epitaxial crystal surface of the silicon carbide substrate (E)