• 专利标题:   Acoustic wave resonator used in electronic filter circuit, has electrode which is arranged on base main portion and covers partial surface of base main portion, and graphene which is provided with metal coating.
  • 专利号:   DE102018207825-B3, US2019356300-A1
  • 发明人:   KNAPP M
  • 专利权人:   FRAUNHOFER GES FOERDERUNG ANGEWANDTEN EV, FRAUNHOFER GES FOERDERUNG ANGEWANDTEN EV
  • 国际专利分类:   H03H009/17, H03H009/56, H03H009/13, H03H009/02
  • 专利详细信息:   DE102018207825-B3 24 Oct 2019 H03H-009/17 201983 Pages: 10 German
  • 申请详细信息:   DE102018207825-B3 DE10207825 18 May 2018
  • 优先权号:   DE10207825

▎ 摘  要

NOVELTY - The acoustic wave resonator (1) has a base main portion (10) which contains or consists of a piezoelectric material. An electrode (2) is arranged on the base main portion and covers a partial surface of the base main portion. A graphene (21) of the electrode is provided with a metal coating (22) made as a partial coating of the graphene. The metal coating comprises a structuring with finger which is provided with a greater length than width in the plane of the electrode. The width of the finger is less than 6 microns or less than 3 microns. The base main portion contains a group III nitride or that the base main portion contains aluminum nitride or. The metal coating contains titanium and/or gold and/or molybdenum and/or tungsten. USE - Acoustic wave resonator used in electronic filter circuit (claimed). ADVANTAGE - The partial coating saves additional mass, so that a negative influence on the resonant frequency of the acoustic wave resonator is avoided. The resonator quality is increased. The occurrence of secondary resonances can be prevented or reduced. The acoustic wave resonator can be operated reliably even with small geometric dimensions and the resulting large field strengths in the main portion. DESCRIPTION OF DRAWING(S) - The drawings show schematic views of the acoustic wave resonator. Acoustic wave resonator (1) Electrode (2) Base main portion (10) Graphene (21) Metal coating (22)