• 专利标题:   Graphene terahertz detector, has metal pattern layer formed on graphene thin film layer, and metal reflecting layer, composite dielectric layer and metal pattern layer that are arranged together to form meta-material structure.
  • 专利号:   CN106129167-A, CN106129167-B
  • 发明人:   WANG J, MOU W, CHENG J, GOU J, JIANG Y
  • 专利权人:   UNIV CHINA ELECTRONIC SCI TECHNOLOGY
  • 国际专利分类:   H01L031/09, H01L031/18
  • 专利详细信息:   CN106129167-A 16 Nov 2016 H01L-031/09 201701 Pages: 9 Chinese
  • 申请详细信息:   CN106129167-A CN10575588 20 Jul 2016
  • 优先权号:   CN10575588

▎ 摘  要

NOVELTY - The detector has a bottom passivation layer formed on a silicon substrate layer and a metal reflecting layer. A graphene thin film layer is formed on a top surface of a microbridge supporting layer. An end of an electrode layer is fixed with the bottom passivation layer and a bridge legs passivation layer. A metal pattern layer is formed on the graphene thin film layer. The metal reflecting layer, a composite dielectric layer and the metal pattern layer are arranged together to form a meta-material structure. Thickness of the graphene film layer is about 0.3-10nm. USE - Graphene terahertz detector. ADVANTAGE - The detector has high response rate, and improves terahertz radiation absorption rate. DETAILED DESCRIPTION - Thickness of the metal pattern layer is about 0.05-0.5 microns. Thickness of the bottom passivation layer is about 0.02-1 microns. Thickness of the metal reflective layer is about 0.05-0.5 microns. Thickness of the electrode layer is about 0.02-1 microns. An INDEPENDENT CLAIM is also included for a graphite terahertz detector manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a partial sectional view of a graphene terahertz detector. '(Drawing includes non-English language text)'