▎ 摘 要
NOVELTY - Preparation of fluorinated graphene involves adding graphene sample to sampling indoor and deep reaction etching machine, transferring the sample to pumping chamber at 10-3 Torr or les, and then into reaction chamber, evacuating pressure inside the reaction chamber to 10-6 Torr or less, passing resultant product through sulfur hexafluoride gas at flow rate of 100 sccm, performing plasma excitation of sulfur hexafluoride at 25-300 W for 30 seconds to 20 minutes, and removing the sample. USE - Preparation of fluorinated graphene (claimed). ADVANTAGE - The method enables simple, economical and controllable preparation of fluorinated graphene with high productivity.