• 专利标题:   Nitrogen doping in chemical vapor deposition (CVD) graphene, by initiating by controller, and performing annealing process using ammonia gas in pressure chamber on CVD graphene at pre-defined temperature for pre-defined period of time, where pressure chamber is maintained at atmospheric pressure.
  • 专利号:   IN202021046163-A, IN427710-B
  • 发明人:   SINGLA R, KOTTANTHARAYIL A
  • 专利权人:   INDIAN INST TECHNOLOGY BOMBAY
  • 国际专利分类:   A61K031/18, C01B032/194, C23C016/40, H01L029/16, H01L029/786
  • 专利详细信息:   IN202021046163-A 29 Apr 2022 C01B-032/194 202264 Pages: 25 English
  • 申请详细信息:   IN202021046163-A IN21046163 22 Oct 2020
  • 优先权号:   IN21046163

▎ 摘  要

NOVELTY - Method for nitrogen doping in a chemical vapor deposition (CVD) graphene, involves initiating by a controller, and performing an annealing process using ammonia gas in a pressure chamber on the CVD graphene at a pre-defined temperature for a pre-defined period of time, where the pressure chamber is maintained at atmospheric pressure. USE - The method is used for nitrogen doping in CVD graphene. ADVANTAGE - None given. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a system for nitrogen doping in a chemical vapor deposition (CVD) graphene comprising a mass flow controller at an inlet of a pressure chamber for controlling flow of ammonia gas to the pressure chamber, a heater present in the pressure chamber on which the CVD graphene is placed, a pressure gauge for measuring the pressure in the pressure chamber, a vacuum pump at the outlet of the pressure chamber, and a controller configured for initiating an annealing process in the pressure chamber on the CVD graphene using ammonia gas at a pre-defined temperature for a pre-defined period of time, where the pressure chamber is maintained at atmospheric pressure.