• 专利标题:   Integrated circuit graphite allylprodine Hall element packaging structure, has organic thin film layer formed on upper surface of graphene channel and provided with inorganic thin film layer.
  • 专利号:   CN102891251-A, CN102891251-B
  • 发明人:   PENG L, SHI R, XU H, WANG S, ZHANG Z
  • 专利权人:   UNIV PEKING
  • 国际专利分类:   H01L043/04, H01L043/06, H01L043/14
  • 专利详细信息:   CN102891251-A 23 Jan 2013 H01L-043/06 201335 Pages: 10 Chinese
  • 申请详细信息:   CN102891251-A CN10340008 13 Sep 2012
  • 优先权号:   CN10340008

▎ 摘  要

NOVELTY - The structure has a graphene Hall element formed with a graphene alkene layer (2). The graphene alkene layer is matched with a graphene channel. An electrode contact terminal is formed with a graphene channel port and provided with a contact electrode (4). An upper surface of the channel is formed with an organic thin film layer (3). The organic thin film layer is provided with an inorganic thin film layer (6) and a negative photo-sensitive polymer (SU-8) photo-resist film layer. The contact electrode is provided with a testing electrode (5) and formed with a metal layer. USE - Integrated circuit graphite allylprodine Hall element packaging structure. ADVANTAGE - The structure is simple and inexpensive, and realizes etching barrier layer channel pattern forming process so as to reduce processing difficulties. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for an integrated circuit graphite allylprodine Hall element packaging method. DESCRIPTION OF DRAWING(S) - The drawing shows a front view of an integrated circuit graphite allylprodine Hall element packaging structure. Graphene alkene layer (2) Organic thin film layer (3) Contact electrode (4) Testing electrode (5) Inorganic thin film layer (6)