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  • 专利标题:   Preparation of graphene-based chip cooling material by reacting substrate, heating, plasma treating, depositing graphene, forming, cooling and transferring.
  • 专利号:   CN103779292-A, CN103779292-B
  • 发明人:   LIU J, XIE X, WANG L, ZHANG Y, WANG H
  • 专利权人:   SHANGHAI INST MICROSYSTEM INFORMATION, SHANGHAI INST MICROSYSTEM INFORMATION
  • 国际专利分类:   C01B031/04, C09K005/14, H01L023/373, C01B032/186, C01B032/19
  • 专利详细信息:   CN103779292-A 07 May 2014 H01L-023/373 201444 Pages: 13 Chinese
  • 申请详细信息:   CN103779292-A CN10753532 31 Dec 2013
  • 优先权号:   CN10753532

▎ 摘　　要

NOVELTY - Preparation of graphene-based chip cooling material comprises reacting substrate in reducing gas, heating, plasma treating with growth gas, depositing graphene, forming, cooling and transferring. USE - Method for preparing of graphene-based chip (claimed). ADVANTAGE - The method is simple and eco-friendly.