▎ 摘 要
NOVELTY - The detector has an integrated graphene substrate whose surface is provided with a waveguide grating coupling region, a photon absorption area and a carrier transition area. Two sides of the integrated graphene substrate are located on a dielectric layer. The dielectric layer is filled with waveguide material. A periphery of the integrated graphene substrate is provided with three ohmic contact electrodes. The ohmic contact electrodes are located on the dielectric layer. Each electrode is formed as a metal/graphene/metal electrode. A graphene/waveguide material semiconductor is provided with a carrier-collection structure. USE - Graphene and grating coupled light detector. ADVANTAGE - The detector can adopt metal/graphene/metal type semiconductor junction principle to detect graphene and grating coupled light. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a graphene and grating coupled light detector manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a graphene and grating coupled light detector. '(Drawing includes non-English language text)'