▎ 摘　　要

NOVELTY - The device has a heater element (101) and a biasing electrode integrated in or on a substrate (110) to heat and bias a sample of interest when positioned in an observation region (102) of the device. A membrane (103) covers an opening in the heater element and substrate in the observation region. The membrane is perforated to form a hole (105). A graphene layer (104) covers the hole in the membrane to form a sample support to place the sample, where the graphene layer has thickness of less than 2 nanometer or thickness in the range of 2 nanometer to 1 micrometer. The membrane is provided with an amorphous silicon nitride layer. USE - Device for supporting a charged particle microscopy sample e.g. transmission electron microscopy sample and focused ion beam microscopy sample, in an advanced material engineering field. ADVANTAGE - The device provides reliable, clean, uniform, and homogeneous graphene layer that can be provided onto a charged particle microscopy sample support with an integrated heater and electrodes to be used to support and enclose the specimen under study, thus providing coverage and high flatness of the graphene layer. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for manufacturing a sample support device for charged particle microscopy. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of a device for supporting a charged particle microscopy sample. Heater element (101) Observation region (102) Membrane (103) Graphene layer (104) Hole (105) Substrate (110)