• 专利标题:   Method for forming fin-type field effect transistor device, involves forming convex dielectric fin over substrate, forming channel layer on upper surface of dielectric fin along wall of dielectric fin, and forming channel enhancement layer.
  • 专利号:   CN113380628-A, US2021376133-A1, DE102020116005-A1, KR2021148794-A, TW744188-B1, TW202145350-A, KR2404491-B1, DE102020116005-B4, US11476356-B2, US2022359737-A1
  • 发明人:   HUNG Y, ZHENG Z, CHEN Z, JIANG H, LI L, CHIANG H, CHEN T, CHENG C, HONGITISE, CENTISEAN, RELANEBELL
  • 专利权人:   TAIWAN SEMICONDUCTOR MFG CO LTD, TAIWAN SEMICONDUCTOR MFG CO LTD, TAIWAN SEMICONDUCTOR MFG CO LTD
  • 国际专利分类:   H01L021/34, H01L029/16, H01L029/24, H01L029/78, H01L051/05, H01L051/30, H01L051/40, H01L029/66, H01L029/76, H01L021/263, H01L021/336, H01L021/768, H01L029/06, H01L029/08, H01L021/335, H01L021/76
  • 专利详细信息:   CN113380628-A 10 Sep 2021 H01L-021/34 202178 Pages: 45 Chinese
  • 申请详细信息:   CN113380628-A CN10101700 26 Jan 2021
  • 优先权号:   US887729, US814620

▎ 摘  要

NOVELTY - The method involves forming a convex dielectric fin over a substrate, and forming a channel layer on an upper surface of dielectric fin along the side wall of dielectric fin. A gate structure is formed above the channel layer, and a metal source/drain region is formed on an opposite side of the gate material. A channel enhancement layer is formed over the channel layer, and a passivation layer is formed above the gate structure, the metal source/drain region and the channel enhancement layer. The low-dimensional material comprises a two-dimensional semiconductor material, carbon nano-tube or graphene nano-belt. The two-dimensional semiconductor material comprises Molybdenum disulfide (MoS2), Tungsten disulfide (WS2) or Tungsten diselenide (WSe2). USE - The method is useful for forming fin-type field effect transistor device. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a fin-type field effect transistor device. DESCRIPTION OF DRAWING(S) - The drawing shows a flowchart illustrating the method for forming fin-type field effect transistor device (Drawing includes non-English language text).