▎ 摘　　要

NOVELTY - Graphene formation involves forming a carbon monolayer on a substrate (10) by injecting a reaction gas into a reaction chamber, where the former reaction gas comprises a source being a carbon source and including a component that belongs to an electron withdrawing group. Another reaction gas including another source is injected into the reaction chamber, where the latter source includes a functional group that forms a volatile structure by reacting with the component that belongs to an electron withdrawing group. The graphene is directly grown on a surface of the substrate by repeatedly injecting the former reaction gas and the second reaction gas. USE - Method of forming graphene. ADVANTAGE - The method of forming graphene has high chemical stability and a wide surface area, and shows having a hexagonal honeycomb structure in which carbon atoms are two dimensionally connected, and has a very small thickness as thin as a level of an atom size. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic cross-sectional view of the method for forming graphene. Substrate (10)