• 专利标题:   Method for manufacturing graphene transistor, involves providing substrate having flat surface, where surface comprises insulating region and adjacent semiconducting region, and forming graphene layer structure on surface.
  • 专利号:   EP3975260-A1, US2022102526-A1, GB2599150-A, US2022102525-A1, GB2599173-A, CN114284349-A, GB2599173-B, GB2599150-B, US11545558-B2, US2023098791-A1
  • 发明人:   BADCOCK T J, WALLIS R, GUINEY I, THOMAS S
  • 专利权人:   PARAGRAF LTD, PARAGRAF LTD, PARAGRAF LTD
  • 国际专利分类:   H01L029/06, H01L029/16, H01L029/78, H01L029/66, H01L029/76, H01L021/02, H01L021/04, H01L021/336, H01L029/10
  • 专利详细信息:   EP3975260-A1 30 Mar 2022 H01L-029/16 202228 Pages: 17 English
  • 申请详细信息:   EP3975260-A1 EP197623 20 Sep 2021
  • 优先权号:   GB015321, GB017408

▎ 摘  要

NOVELTY - The method involves forming a graphene layer structure (115) on the surface, where the graphene layer structure is arranged on and across a portion of both the insulating region (110) and the adjacent semiconducting region. A layer of dielectric material (120) formed on a portion of the graphene layer structure which is itself arranged on the semiconducting region. A source contact (125) provided on a portion of the graphene layer structure which is itself arranged on the insulating region. A gate contact (130) provided on the layer of dielectric material and above a portion of the graphene layer structure which is itself arranged on the semiconducting region and a drain contact (135) provided on the semiconducting region of the substrate surface. A semiconductor substrate (105) comprises silicon, germanium or a III-V semiconductor, preferably one or more of Si, SiC, Ge, GaN, AIGaN. USE - Method for manufacturing graphene transistor. ADVANTAGE - The provision of a flat graphene layer allows for improved electronic properties which enable enhanced transistor performance. The method allows for the manufacture of a transistor comprising graphene along with the other components necessary to allow the electronic device to operate whilst also not being detrimental to the graphene properties. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a device for manufacturing a graphene transistor. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of the graphene transistor. Semiconductor substrate (105) Insulating region (110) Graphene layer structure (115) Dielectric material (120) Source contact (125) Gate contact (130) Drain contact (135)