• 专利标题:   Manufacture of nitrogen-doped graphene film used as conductive film, involves forming nitrogen-doped graphene film on base by irradiating base with plasma containing hydrocarbon, nitrogen, and oxygen having preset partial pressure.
  • 专利号:   WO2017213045-A1, JP2018522453-X
  • 发明人:   OKIGAWA YUKI, YAMADA TAKATOSHI, ISHIHARA MASATOU, HASEGAWA MASATAKA
  • 专利权人:   NAT INST ADVANCED IND SCI TECHNOLOGY
  • 国际专利分类:   C01B032/182, C23C016/26, H01L021/205, C23C016/01, C01B032/186, C01B032/194
  • 专利详细信息:   WO2017213045-A1 14 Dec 2017 C23C-016/26 201801 Pages: 29 Japanese
  • 申请详细信息:   WO2017213045-A1 WOJP020603 02 Jun 2017
  • 优先权号:   JP114627

▎ 摘  要

NOVELTY - Manufacture of nitrogen-doped graphene film involves forming the nitrogen-doped graphene film on a base by irradiating the base with plasma comprising hydrocarbon, nitrogen, water, and oxygen. The partial pressure of water contained in the plasma is 0.015 or less with respect to total pressure of the plasma. The partial pressure of oxygen contained in the plasma is 0.002 or less with respect to total pressure of the plasma. USE - Manufacture of nitrogen-doped graphene film used as conductive film for transparent electrode of electronic device. ADVANTAGE - The method enables efficient manufacture of nitrogen-doped graphene film with large area, while controlling position of substitution of nitrogen atoms.