• 专利标题:   Method for preparing graphene field effect transistor integrated device, involves preparing source electrode and drain electrode on graphene layer by means of mask lithography, and obtaining graphene field effect transistor.
  • 专利号:   CN115000164-A
  • 发明人:   SONG Q, TIAN J, WANG C, SUN H, ZHANG W, HU B, JIA Y
  • 专利权人:   UNIV SHENZHEN TECHNOLOGY
  • 国际专利分类:   H01L021/336, H01L029/06, H01L029/49, H01L029/51, H01L029/772
  • 专利详细信息:   CN115000164-A 02 Sep 2022 H01L-029/51 202284 Chinese
  • 申请详细信息:   CN115000164-A CN10733104 27 Jun 2022
  • 优先权号:   CN10733104

▎ 摘  要

NOVELTY - The method comprises providing a flexible substrate, where the flexible substrate is fixed on a substrate, forming a gate on the substrate by means of thermal evaporation, sequentially forming a layer of Ti nucleation layer and HfO2 gate dielectric layer on the gate using the method of atomic layer deposition (ALD) coating, utilizing the seal method to transfer graphene on the HfO2 gate dielectric layer to obtain a graphene layer, preparing the source electrode and the drain electrode on the graphene layer by means of mask lithography, forming a coating layer on the graphene layer by using the method of ALD coating, peeling off the substrate obtained in the preparation step of the cladding layer from the substrate, obtaining a graphene field effect transistor, and connecting the gate on the graphene field effect transistors to the drain on the other graphene field effect transistor. USE - Method for preparing graphene field effect transistor integrated device. ADVANTAGE - The method overcomes the problem of non-uniform performance of the existing graphene field effect transistor devices. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a graphene field effect transistor integrated device prepared by the above mentioned method. DESCRIPTION OF DRAWING(S) - The drawing shows a flow chart illustrating the method for preparing graphene field effect transistor integrated device (Drawing includes non-English language text).