• 专利标题:   Device e.g. sensor, consists of biopolymer membrane comprising bacterial cellulose and having preset thickness, passivation layer, graphene layer, source electrode and drain electrode, and in which graphene layer extends between electrodes.
  • 专利号:   US9679970-B1
  • 发明人:   SON K, YANG B, SEO H C, WONG D, MOON J
  • 专利权人:   HRL LAB LLC
  • 国际专利分类:   H01L023/29, H01L023/31, H01L029/16, H01L029/66, H01L029/78, H01L029/786
  • 专利详细信息:   US9679970-B1 13 Jun 2017 H01L-029/78 201742 Pages: 18 English
  • 申请详细信息:   US9679970-B1 US965785 10 Dec 2015
  • 优先权号:   US118424P, US965785

▎ 摘  要

NOVELTY - A device consists of a biopolymer membrane (10) comprising a biopolymer, a passivation layer (20), a graphene layer, a source electrode and a drain electrode, formed in order. The graphene layer extends between the source electrode and the drain electrode. The thickness of the biopolymer membrane is less than 10 mu m. The biopolymer membrane preferably comprises a bacterial cellulose. USE - Device e.g. transistor and sensor (all claimed) for medical diagnosis and monitoring, neural prosthetics and brain-machine interface. ADVANTAGE - The device has excellent durability and flexibility, high carrier mobility and low drain voltage and gate potential, and can be microfabricated by economical process with high yield. The sensor comprising the biopolymer does not cause damage with respect to tissues and nerves. DESCRIPTION OF DRAWING(S) - The drawing shows schematic cross-sectional view of graphene transistor. Biopolymer membrane (10) Graphene (12) Gate insulator (17) Gate electrode (18) Passivation layer (20)