• 专利标题:   Interconnecting carbon nanotube device of graphene/metal composite electrode involves preparing carbon nanotube device, annealing at high temperature, and decomposing carbon source gas molecules into carbon atoms or dissolving in electrode.
  • 专利号:   CN106683991-A, US2018163299-A1
  • 发明人:   CHEN C, GAO J, WANG Y, ZHOU W, ZHU Y
  • 专利权人:   UNIV HUAZHONG SCI TECHNOLOGY, UNIV HUAZHONG SCI TECHNOLOGY
  • 国际专利分类:   H01L021/28, H01L021/768, C23C016/02, C23C016/26, C25D013/02
  • 专利详细信息:   CN106683991-A 17 May 2017 H01L-021/28 201745 Pages: 9 Chinese
  • 申请详细信息:   CN106683991-A CN11130639 09 Dec 2016
  • 优先权号:   CN11130639

▎ 摘  要

NOVELTY - Interconnecting carbon nanotube device of graphene/metal composite electrode comprises designing and preparing pre-patterned metal thin film electrode on substrate, interposing carbon nanotubes between pre-patterned metal thin film electrode, annealing carbon nanotube device at high temperature in mixed atmosphere of hydrogen and argon, and decomposing carbon source gas molecules catalytically into carbon atoms by metal atoms of metal thin film electrode, or dissolving in metal thin film electrode to reach saturated concentration. USE - Method for interconnecting carbon nanotube device of graphene/metal composite electrode (claimed). ADVANTAGE - The method reduces contact resistance of graphene and carbon nanotubes, and reduces power consumption of device. DETAILED DESCRIPTION - Interconnecting carbon nanotube device of graphene/metal composite electrode comprises designing and preparing pre-patterned metal thin film electrode on substrate according to layout of carbon nanotube device; interposing carbon nanotubes between pre-patterned metal thin film electrode in dispersion suspension mixed with carbon nanotubes and volatile organic solvents to connect carbon nanotubes to metal thin film electrodes at both ends forming carbon nanotubes device; annealing carbon nanotube device at high temperature in mixed atmosphere of hydrogen and argon to contact part of carbon atoms at both ends of carbon nanotube with metal thin film electrode; and decomposing carbon source gas molecules catalytically into carbon atoms by metal atoms of metal thin film electrode using chemical vapor deposition (CVD), where carbon source gas is methane, ethylene or acetylene, or dissolving in metal thin film electrode to reach saturated concentration in metal surface precipitation nucleation to grow into graphene.