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  • 专利标题:   Electro-optic modulator used in optical communication, has two electrodes that are formed above substrate, where one electrode is electrically connected with optical waveguide structure and another electrode is electrically connected with graphene layer.
  • 专利号:   CN113655644-A
  • 发明人:   LI Z, XIE L, OU X, LI B, LIU R, ZHANG P, SUN F, TANG B, YANG Y
  • 专利权人:   INST MICROELECTRONICS CHINESE ACAD SCI
  • 国际专利分类:   G02F001/03, G02F001/035
  • 专利详细信息:   CN113655644-A 16 Nov 2021 G02F-001/03 202214 Chinese
  • 申请详细信息:   CN113655644-A CN10796025 14 Jul 2021
  • 优先权号:   CN10796025

▎ 摘　　要

NOVELTY - The electro-optic modulator has an optical waveguide structure (2) that is formed on a substrate (1). The optical waveguide structure comprises a slit waveguide portion (21) provided with a Bragg resonant cavity. A graphene layer (3) covers the slit waveguide portion. The slit waveguide portion is used for making the optical signal local to the graphene layer. A first electrode (4) and a second electrode (5) are formed above the substrate. The first electrode is electrically connected with the optical waveguide structure. The second electrode is electrically connected with the graphene layer. The slit waveguide portion is provided with multiple adjusting structures distributed periodically, along the extending direction of the slit waveguide portion. USE - Electro-optic modulator used in optical communication field. ADVANTAGE - The modulator enhances the interaction between the optical signal and the graphene layer, thus improving the electro-optic modulation response degree of the modulator when working, and improving the working performance of the optical waveguide structure. DESCRIPTION OF DRAWING(S) - Substrate (1) Optical waveguide structure (2) Graphene layer (3) First electrode (4) Second electrode (5) Light-transmitting medium layer (6) Slit waveguide portion (21) Connecting portion (22)