• 专利标题:   Method for manufacturing two-dimensional material nanometer semiconductor device, involves forming source electrode, drain electrode, grid medium layer and grid electrode on graphene thin film.
  • 专利号:   CN102867754-A
  • 发明人:   XIAO K, WU H, LV H, QIAN H, WU X
  • 专利权人:   UNIV TSINGHUA
  • 国际专利分类:   H01L021/336, H01L029/49, H01L029/78
  • 专利详细信息:   CN102867754-A 09 Jan 2013 H01L-021/336 201326 Pages: 15 Chinese
  • 申请详细信息:   CN102867754-A CN10331608 07 Sep 2012
  • 优先权号:   CN10331608

▎ 摘  要

NOVELTY - The method involves providing a substrate. A transition layer is formed on the substrate. A metal wiring layer is formed on the transition layer. The metal wiring layer is filled in an interlayer dielectric layer to form a metal wiring interlayer dielectric layer. A connecting line is formed on the interlayer medium layer. A connecting part is connected with the metal wiring layer. A source electrode, a drain electrode, a grid medium layer and a grid electrode are formed on a graphene thin film. USE - Method for manufacturing a 2D material nanometer semiconductor device. ADVANTAGE - The method enables manufacturing a 2D material nanometer semiconductor device in an easy, stable and reliable manner with better gate control capability and small source-drain contact. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a two-dimensional (2D) material nanometer semiconductor device. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a 2D material nanometer semiconductor device.