• 专利标题:   Device used e.g. for etching continuous substrate and graphene comprises feeding and etching device.
  • 专利号:   CN107435148-A, CN207193398-U
  • 发明人:   ZHANG H, LI T, TAN H
  • 专利权人:   WUXI GRAPHENE FILM CO LTD
  • 国际专利分类:   C01B032/184, C23F001/08
  • 专利详细信息:   CN107435148-A 05 Dec 2017 C23F-001/08 201801 Pages: 14 Chinese
  • 申请详细信息:   CN107435148-A CN10669517 08 Aug 2017
  • 优先权号:   CN10669517, CN20981297

▎ 摘  要

NOVELTY - Device comprises feeding and etching device. An etching device is disposed downstream of feeding device for receiving continuous product. The etching device contains etching solution. The continuous product passes through etching device. The etching device applies etching solution to continuous product to remove continuous substrate. USE - Device used for etching continuous substrate and graphene and detecting parameters of etching solution (claimed).