▎ 摘 要
NOVELTY - The apparatus has a chamber (100) that is provided with a space for graphene synthesis and spaced apart from each other in the chamber. A first roller portion (400) and a second roller portion (500) support the catalyst metal that penetrates the inside of the chamber and heats the catalyst metal by receiving a current for graphene synthesis. A first region of the catalyst metal is close to the first roller portion and the second region of the catalyst metal close to the second roller portion are arranged to have a movement path facing each other. USE - Graphene manufacturing apparatus. ADVANTAGE - The temperature profile of the catalyst metal can be maintained uniformly. The yield of high-quality graphene is greatly increased. The stable movement is ensured without damage or loss of the catalyst metal and the catalyst metal synthesized by graphene. The vacuum atmosphere inside the vacuum chamber can be stably maintained. DETAILED DESCRIPTION - The displacement sensor detects whether the lengths extending from the first roller portion and the second roller portion to the lower side of the catalyst metal match the reference deflection lengths. A control unit controls the rotational speed of the first roller unit or the second roller unit such that the length of the catalyst metal sensed by the displacement sensor matches the reference deflection length. A discharge unit discharges the catalyst metal synthesized with graphene to the outside and arranged in the introduction portion and the exit portion, while guiding the movement of the catalyst metal and at the same time blocking the inflow of external air. A sealing guide has a guide hole that elastically contacts the surface of the catalytic metal. The sealing guide includes a pair of sealing guides are spaced apart from each other in the moving direction of the catalyst metal. An auxiliary vacuum pump creates a space between the pair of sealing guides in a vacuum atmosphere. A guide cover has a second through hole through which the catalyst metal passes. A sealing portion is interposed between the guide portion and the guide cover. A fastening unit fastens the guide portion and the guide cover with the sealing portion. The size of the guide hole is formed in the discharge portion larger than the size of the guide hole arranged in the introduction portion. A protective film supply forms a protective layer on the graphene layer of the catalyst metal passing through the first roller portion and the second roller portion. An INDEPENDENT CLAIM is included for a graphene manufacturing method, involves supplying the catalyst metal in the chamber. The catalyst metal is placed in the chamber such that the first region of the catalyst metal close to the first roller portion and the second region of the catalyst metal close to the second roller portion have movement paths facing each other. The graphene is synthesized on the catalyst metal. The catalyst metal synthesized from the graphene is recovered from the chamber. The catalyst metal is stretched downward between the first roller portion and the second roller portion, the first region and the second region have a movement path facing each other. The rotational speed of the first roller portion or the second roller portion is controlled so that the length of the catalyst metal sag coincides with a reference deflection length. A protective layer is formed on the graphene layer of the catalyst metal passing through the first roller portion and the second roller portion. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a graphene manufacturing apparatus. Chamber (100) Gas inlet (101) Gas outlet (102) First roller portion (400) Second roller portion (500)