• 专利标题:   Manufacturing method of graphene device involves growing graphene (GRP) on substrate in which the pattern with a material-containing carbon.
  • 专利号:   US2016365415-A1
  • 发明人:   PARK S R, CHOI C G
  • 专利权人:   ELECTRONICS TELECOM RES INST
  • 国际专利分类:   H01L021/02, H01L029/16, H01L029/417, H01L029/66, H01L029/786
  • 专利详细信息:   US2016365415-A1 15 Dec 2016 H01L-029/16 201702 Pages: 12 English
  • 申请详细信息:   US2016365415-A1 US176127 07 Jun 2016
  • 优先权号:   KR082522, KR028517

▎ 摘  要

NOVELTY - The manufacturing method involves forming on a substrate a pattern with a material- containing carbon, and growing graphene (GRP) on the substrate in which the pattern is formed. The substrate includes a metal catalyst layer including copper, nickel, cobalt, iron, platinum, gold, aluminum, chromium, magnesium, manganese, rhodium, tantalum, titanium, tungsten , uranium, vanadium, zirconium or a combination. USE - Manufacturing method of graphene device used in electronic devices including transistors, bio engineering, energy storage, optical cells. ADVANTAGE - Reduces the process time and costs since there is no need for a separate metal. Obtains a graphene device in a simple manner without an additional process, by applying the single-layer and/or multiple-layer graphene to devices such as a channel, source, drain and the like. Capable of synthesizing multiple-layer graphene and single-layer graphene in a simple method, and apply the graphene in manufacturing a device easily without any further process. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of the graphene device. Graphene (GRP) Target substrate (T-SUB)