• 专利标题:   Laser inducing graphene manufacturing method involves completing growth of laser induced porous graphene on polymer layer and removing remaining polymer layer material to finish laser induced porous graphene patterning process.
  • 专利号:   CN107039257-A
  • 发明人:   ZHANG M, LIANG J, LIU Y, WU Y, WANG X
  • 专利权人:   UNIV TSINGHUA SHENZHEN GRADUATE SCHOOL
  • 国际专利分类:   H01L021/027, H01L021/268
  • 专利详细信息:   CN107039257-A 11 Aug 2017 H01L-021/268 201768 Pages: 7 Chinese
  • 申请详细信息:   CN107039257-A CN10220721 06 Apr 2017
  • 优先权号:   CN10220721

▎ 摘  要

NOVELTY - The method involves forming a metal layer on the polymer layer formed on a substrate. The metal layer is patterned to form a metal mask layer. The growth of the laser induced porous graphene is completed on the polymer layer using the laser mask region of the metal mask layer for irradiation. The remaining polymer layer material is removed to finish the laser induced porous graphene patterning process. USE - Laser inducing graphene manufacturing method. ADVANTAGE - The processing precision of the porous graphene is improved. The process and the processing operation are simplified. The cost is reduced. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic diagram of irradiation of mask region of metal mask layer using laser light. Polymer layer (2) Substrate (3) Metal mask layer (4) Laser (5)