• 专利标题:   Optical sensor, has graphene layer which is provided on insulating layer and having opening for exposing portion of insulation layer, and plasmon antenna which is in contact with insulation layer through opening.
  • 专利号:   JP2021192015-A
  • 发明人:   MIYATAKE T
  • 专利权人:   FUJITSU LTD
  • 国际专利分类:   G01J001/02, H01L031/08
  • 专利详细信息:   JP2021192015-A 16 Dec 2021 G01J-001/02 202209 Pages: 13 Japanese
  • 申请详细信息:   JP2021192015-A JP098695 05 Jun 2020
  • 优先权号:   JP098695

▎ 摘  要

NOVELTY - The sensor (1) has a graphene layer (13) provided on an insulating layer (12) and formed with an opening unit (13X) for exposing a section of the insulating layer. A plasmon antenna (14) is contacted with the insulating layer through the opening unit, where an end surface of the plasmon antenna is selected as an upper surface of the graphene layer. The plasmon antenna is arranged in an inner side of the opening unit, where the distance between the plasmon antenna and the graphene layer is about 100 nm or less. USE - Optical sensor. ADVANTAGE - The sensor has high sensitivity. DESCRIPTION OF DRAWING(S) - The drawing shows a cross sectional view of an optical sensor. (Drawing includes non-English language text). Optical sensor (1) Insulating layer (12) Graphene layer (13) Opening unit (13X) Plasmon antenna (14)