• 专利标题:   Formation of transparent conductive film for, e.g. solar cells, involves guiding camphor vapors on heated substrate, thermally decomposing vapors and forming graphene sheet, peeling sheet by etching, and affixing peeled sheet on target.
  • 专利号:   JP2012020915-A
  • 发明人:   KALITA G, UMENO M, WAKITA K
  • 专利权人:   UMENO M
  • 国际专利分类:   C01B031/02, C23C016/26, H01B013/00, H01B005/14
  • 专利详细信息:   JP2012020915-A 02 Feb 2012 C01B-031/02 201211 Pages: 10 Japanese
  • 申请详细信息:   JP2012020915-A JP161678 16 Jul 2010
  • 优先权号:   JP161678

▎ 摘  要

NOVELTY - A substrate (21) which forms a graphene sheet (50) is arranged in region (II) of CVD reaction container. Camphor vapors are guided on the heated substrate. The vapors are thermally decomposed on the substrate and a graphene sheet is formed on the substrate. The contacting surface of graphene sheet and substrate is wet-etched and the graphene sheet is peeled in the etching solution (60). The peeled graphene sheet is affixed on a target (70), to obtain a transparent conductive film. USE - Formation of transparent conductive film (claimed) for solar cells and electronic apparatus. ADVANTAGE - The method enables simple and economical formation of large-area transparent conductive films having high transmittance and low resistivity, by using a simple apparatus and no explosive gas, such as hydrogen. The graphene sheet can be peeled easily without any damage. Camphor is used instead of rare-metal. DETAILED DESCRIPTION - Camphor is arranged on region (I) of a chemical vapor deposition (CVD) reaction container. A substrate which forms a graphene sheet is arranged in region (II) of CVD reaction container. Region (I) is heated and camphor is vaporized. The vapors are guided on the substrate heated by orienting a carrier gas of inert gas to region (II) and flowing from region (I). The vapors are thermally decomposed on the substrate and a graphene sheet is formed on the substrate. The contacting surface of graphene sheet and substrate is wet-etched and the graphene sheet is peeled in the etching solution. The peeled graphene sheet is affixed on a target, to obtain a transparent conductive film. An INDEPENDENT CLAIM is included for transparent conductive film. DESCRIPTION OF DRAWING(S) - The drawing shows a process drawing of the formation method of transparent conductive film. (Drawing includes non-English language text) Substrate (21) Silicon wafer (40) Graphene sheet (50) Etching solution (60) Target (70)