• 专利标题:   Graphene-contacted nanotube photo-detector, has carbon nanotube film formed on electrode, first graphene sheet formed on nanotube film, and second graphene sheet for exerting electrical field on first sheet that changes electrical property.
  • 专利号:   US2019296158-A1, US10741707-B2
  • 发明人:   FALK A L, CHIU K, FARMER D B, HAN S
  • 专利权人:   INT BUSINESS MACHINES CORP
  • 国际专利分类:   H01L029/16, H01L031/028, H01L031/18
  • 专利详细信息:   US2019296158-A1 26 Sep 2019 H01L-031/028 201974 Pages: 15 English
  • 申请详细信息:   US2019296158-A1 US933681 23 Mar 2018
  • 优先权号:   US933681

▎ 摘  要

NOVELTY - The photo-detector has a carbon nanotube film (502) formed on an electrode (902) i.e. graphene sheet. A first graphene sheet is formed on the carbon nanotube film. A second graphene sheet exerts electrical field on the first graphene sheet that changes electrical property of the first graphene sheet. An insulator layer (702) is directly formed between the first graphene sheet and the second graphene sheet. A conductive metal electrode (206) is formed on a same side of the first graphene sheet as the insulator layer. The second graphene sheet is positioned between the first graphene sheet and a light source. USE - Graphene-contacted nanotube photo-detector for an integrated circuit chip. ADVANTAGE - The photo-detector detects plasmonic photon absorption by carbon nanotubes to utilize one or more layers of graphene as an electrode, and a relatively thick film of the carbon nanotubes to increase absorption, while using the electrical properties of graphene to tune and optimize performance of the photo-detector by adjusting Fermi level of the graphene contact. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for forming a graphene-contacted nanotube photo-detector. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a carbon nanotube photo-detector where electrodes are formed on graphene films. Semi-conductor substrate (202) Conductive metal electrode (206) Carbon nanotube film (502) Insulator layer (702) Electrode (902)