• 专利标题:   Preparing low square resistance, ultra-clean graphene transparent electrode, comprises depositing graphene on a metal substrate by chemical vapor deposition, processing the substrate with graphene, etching, and cleaning.
  • 专利号:   CN113023719-A
  • 发明人:   WANG Z, ZHANG Z, WANG W, LIU Z
  • 专利权人:   NINGBO INST MATERIALS TECHNOLOGY ENG C
  • 国际专利分类:   C01B032/186, C01B032/194, H01L051/52, H01L051/56
  • 专利详细信息:   CN113023719-A 25 Jun 2021 C01B-032/194 202165 Pages: 10 Chinese
  • 申请详细信息:   CN113023719-A CN10249209 08 Mar 2021
  • 优先权号:   CN10249209

▎ 摘  要

NOVELTY - Preparing low square resistance, ultra-clean graphene transparent electrode, comprises depositing (2-8) layers of graphene on a metal substrate by chemical vapor deposition; processing the substrate with graphene to obtain the processed graphene-grown substrate; placing the processed graphene-grown substrate in an etching solution for etching, cleaning and transferring into the dopant solution, then transferring into the target substrate, and drying to obtain graphene transparent electrode; where the surface tension of the etching solution and the dopant solution is 0.01-1000 N/m. USE - The method is useful for preparing low square resistance, ultra-clean graphene transparent electrode. ADVANTAGE - The graphene film has no impurities on the surface; the dopant is located between the few-layer graphene and the substrate, and the few-layer graphene with fewer defects reduces the chance of contact between the dopant and the outside world. The square resistance of the graphene film remains stable for a long time. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for low square resistance, ultra-clean graphene transparent electrode.