• 专利标题:   Protecting-type graphene thin film etching and transferring device, has square-shaped clamps provided with clamp columns, and clamp clearance part connected between clamps, where sizes of clamps are same.
  • 专利号:   CN104332395-A, CN104332395-B
  • 发明人:   LI Z, SHI H, ZHONG D, CUI H, TAN Q
  • 专利权人:   CHONGQING MOXI TECHNOLOGY CO LTD, CHINESE ACAD SCI CHONGQING GREEN INTEL, CHONGQING GRAPHENE TECH CO LTD, CHINESE ACAD SCI CHONGQING GREEN INTEL
  • 国际专利分类:   H01L021/02, H01L021/687
  • 专利详细信息:   CN104332395-A 04 Feb 2015 H01L-021/02 201525 Pages: 16 Chinese
  • 申请详细信息:   CN104332395-A CN10606169 29 Oct 2014
  • 优先权号:   CN10606169

▎ 摘  要

NOVELTY - The device has two square-shaped clamps (1, 2) provided with two clamp columns (3, 6). Sizes of the two clamps are same. Two clamps are connected with each other through an activity buckle (4). A clamp clearance part (5) is connected between two clamps. Two induction chips (7, 8) are connected with two clamps. An upper buckle groove is formed with one of the clamp. An activity hook is matched with the upper buckle groove. Two clamp columns are provided with skid-proof lines (11). USE - Protecting-type graphene thin film etching and transferring device. ADVANTAGE - The device utilizes two clamps to perform etching process on the graphene thin film and avoid damage of the graphene thin film during transferring process in an effective manner. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a protecting-type graphene thin film etching and transferring method. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of a protecting-type graphene thin film etching and transferring device. Clamps (1, 2) Clamp columns (3,6) Activity buckle (4) Clamp clearance part (5) Induction chips (7,8) Skid-proof lines (11)