• 专利标题:   Method for growing large-area single crystal graphene, involves using nozzle corresponding to substrate pattern to carry out fixed point carbon source transportation and passing methane for fixed point nucleation for graphene growth.
  • 专利号:   CN110359088-A
  • 发明人:   LAN F, WANG Z, ZHANG S, DONG Z, HAO J
  • 专利权人:   CHINA ELECTRONICS TECHNOLOGY GROUP CORP
  • 国际专利分类:   C30B025/00, C30B029/02
  • 专利详细信息:   CN110359088-A 22 Oct 2019 C30B-029/02 201986 Pages: 5 Chinese
  • 申请详细信息:   CN110359088-A CN10725173 07 Aug 2019
  • 优先权号:   CN10725173

▎ 摘  要

NOVELTY - The method involves placing the patterned substrate in a graphene growth system, heating the system to 300-500 degrees C under argon and oxygen atmosphere. The system temperature is raised to 900-1000 degrees C within 30 minutes, 50 ccm of hydrogen is introduced, the nucleation process begins, and the nucleation process time is 10 minutes. The nozzle corresponding to the substrate pattern is used to carry out the fixed point carbon source transportation. A methane flow rate of 5sccm is passed for fixed point nucleation for graphene growth, and growth time is 30-60minutes. The growth is finished, cooled and sampled. USE - Method for growing large-area single crystal graphene. ADVANTAGE - The method has high controllability and good repeatability, and is favorable for the growth of large-area single crystal graphene. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a nozzle in a combined growth apparatus of the method for growing large-area single crystal graphene.