• 专利标题:   Characterization of graphene on platinum substrate for e.g. device fabrication, involves coating methylene blue developer on platinum substrate covered with graphene, passing in hydrogen-containing gas, vacuuming, observing substrate color and removing residue of developer.
  • 专利号:   CN113866161-A, CN113866161-B, US2023160868-A1
  • 发明人:   CHEN Z, ZHANG Y, YU G, KANG H
  • 专利权人:   SHANGHAI INST MICROSYSTEM INFORMATION
  • 国际专利分类:   G01N021/78, G01N033/208
  • 专利详细信息:   CN113866161-A 31 Dec 2021 G01N-021/78 202227 Chinese
  • 申请详细信息:   CN113866161-A CN11404530 24 Nov 2021
  • 优先权号:   CN11404530

▎ 摘  要

NOVELTY - Characterization of graphene on platinum substrate involves preparing methylene blue developer, coating the methylene blue developer on the platinum substrate whose surface is covered with graphene, placing the substrate sample into reactor, passing in hydrogen-containing gas until color of the sample is changed, vacuuming to evaporate the methylene blue developer, stopping the vacuum supply and observing the sample, and removing the residue of the methylene blue developer. USE - Characterization of graphene on platinum substrate to provide graphene quality information used for material growth research and device fabrication. ADVANTAGE - The method is simple, easy and carried out without heating condition, and effectively reacts methyl blue developer with hydrogen-containing gas under the catalysis of platinum to generate colorless methylene white in exposed area of platinum and oxidizing to quickly change into blue to form color change difference, which is useful for large-area characterization of graphene on platinum substrates without damaging the surface of graphene and platinum substrates, and without affecting the quality of graphene, and recycles the platinum substrates to reduce the cost.