• 专利标题:   Method for preparing manganese-doped zinc oxide dilute magnetic semiconductor thin film, involves controlling direct current (DC) magnetron sputtering device, coating substrate, and cooling to room temperature to obtain manganese-doped zinc oxide diluted magnetic semiconductor film.
  • 专利号:   CN113308669-A, CN113308669-B
  • 发明人:   LIU F, WU P, HONG B, ZHAO W
  • 专利权人:   UNIV BEIHANG HEFEI INNOVATION RES INST
  • 国际专利分类:   C23C014/08, C23C014/35, H01F041/18, H01L043/10, H10N052/85
  • 专利详细信息:   CN113308669-A 27 Aug 2021 C23C-014/08 202178 Pages: 9 Chinese
  • 申请详细信息:   CN113308669-A CN10453139 26 Apr 2021
  • 优先权号:   CN10453139

▎ 摘  要

NOVELTY - The method involves weighing an appropriate amount of zinc source and manganese source powder, and mixing evenly by ball milling. The mixed powder is mixed with an organic binder and mixed uniformly, and pressed into a round cake-shaped compound. The round cake-shaped composite is calcined at 400-1100 degrees C for 8-10 hours, then cooled to room temperature to obtain a manganese-doped zinc oxide target. A graphene sheet attached to a copper foil as a substrate is cleaned in a container filled with acetone for five minutes, and then dried with hot air. A silver glue is applied to the center of appliance that holds the cleaned substrate, the substrate is put on the silver glue, and the substrate is bonded and fixed with the silver glue. A DC magnetron sputtering device is controlled, the substrate is coated with magnetron sputtering target material, and cooled to room temperature to obtain a manganese-doped zinc oxide diluted magnetic semiconductor film, after the coating is finished. USE - Method for preparing manganese-doped zinc oxide dilute magnetic semiconductor thin film. ADVANTAGE - The target material and substrate are more uniform, the manganese-doped zinc oxide composite film is more stable, and ferromagnetic and photoluminescence properties are excellent, using DC magnetron sputtering technology. DESCRIPTION OF DRAWING(S) - The drawing shows a graphical representation of the XRD pattern of the doped zinc oxide film plated on the product at preset substrate temperature. (Drawing includes non-English language text)