▎ 摘　　要

NOVELTY - Manufacture of graphene (39) involves supplying carbon-containing gas to catalyst metal layer (38), heating the catalyst metal layer by irradiating laser beam (L), and cooling. USE - Manufacture of graphene e.g. carbon nanotube (claimed) used for manufacturing semiconductor device. ADVANTAGE - The method enables manufacture of graphene with high quality and productivity, by controlling supply of heat energy. The carbon nanotube has excellent electroconductivity and thermal conductivity. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for method for growing carbon nanotube, which involves forming catalyst metal microparticles by irradiating laser-beam to the catalyst metal layer, and growing carbon nanotube by supplying carbon-containing gas to the catalyst metal microparticles. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view explaining manufacture of graphene. (Drawing includes non-English language text) Nitride film layer (37) Catalyst metal layer (38) Graphene (39) Laser beam (L) Substrate (W)