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  • 专利标题:   Manufacture of graphene-like substance for electronic device involves heating substrate, introducing gas containing hydrocarbon, and forming graphene-like substance on substrate by plasma chemical vapor deposition method.
  • 专利号:   JP2013163609-A
  • 发明人:   SUGITA H, KISHI N, SOGA T, JIMBO T
  • 专利权人:   UNIV NAGOYA
  • 国际专利分类:   C01B031/02, C23C016/26, C23C016/511
  • 专利详细信息:   JP2013163609-A 22 Aug 2013 C01B-031/02 201359 Pages: 6 Japanese
  • 申请详细信息:   JP2013163609-A JP026761 10 Feb 2012
  • 优先权号:   JP026761

▎ 摘　　要

NOVELTY - Graphene-like substance is manufactured by heating substrate at 500-1000 degrees C, introducing gas containing hydrocarbon, and forming graphene-like substance on substrate by plasma chemical vapor deposition (CVD) method. USE - Manufacture of graphene-like substance for electronic device or transparent electrode. ADVANTAGE - High quality graphene-like substance is manufactured at low cost.