• 专利标题:   Photoacoustic effect based gas sensor has elastic layer and cavity wall that enclose cavity, electrically sensitive layer which is placed on elastic layer, and source and drain electrodes that are placed on electrically sensitive layer.
  • 专利号:   CN112782089-A
  • 发明人:   YU M
  • 专利权人:   YU M
  • 国际专利分类:   G01N021/17
  • 专利详细信息:   CN112782089-A 11 May 2021 G01N-021/17 202146 Pages: 7 Chinese
  • 申请详细信息:   CN112782089-A CN11525743 22 Dec 2020
  • 优先权号:   CN11525743

▎ 摘  要

NOVELTY - The gas sensor has an air inlet (2) and an air outlet (3) that are arranged on opposite sides of a cavity wall (1), and a light transmission hole (4) is arranged on the cavity wall. The light transmission hole is on a same side as the air inlet, and an elastic layer (5) covers the cavity wall. The elastic layer and the cavity wall enclose a cavity, and an electrically sensitive layer (6) is placed on the elastic layer. A source electrode (7) and a drain electrode (8) are placed on both sides of the electrically sensitive layer. The electrically sensitive layer is a graphene layer. USE - Photoacoustic effect based gas sensor. ADVANTAGE - The gas sensor has high gas concentration detecting sensitivity. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the photoacoustic effect based gas sensor. Cavity wall (1) Air inlet (2) Air outlet (3) Light transmission hole (4) Elastic layer (5) Electrically sensitive layer (6) Source electrode (7) Drain electrode (8)