• 专利标题:   Device for producing roll-to-roll graphene film on substrate, has high temperature process chamber which is rotatably connected with at least two pairs of conveying rollers, and provided with driving device for driving two substrates to attach with each other.
  • 专利号:   CN115465858-A
  • 发明人:   JU Y, YI J, WANG D, LU W, WANG W
  • 专利权人:   CHONGQING GRAPHENE INST
  • 国际专利分类:   C01B032/186
  • 专利详细信息:   CN115465858-A 13 Dec 2022 C01B-032/186 202304 Chinese
  • 申请详细信息:   CN115465858-A CN11249550 12 Oct 2022
  • 优先权号:   CN11249550

▎ 摘  要

NOVELTY - The device has a high temperature process chamber (1) and a gas supply unit which is connected to the high temperature process chamber. The high temperature process chamber is rotatably connected with at least two pairs of conveying rollers. Each conveying roller is provided with two opposite rotating rollers which are used for forming a conveying space for conveying two parallel substrates at the same time. The high temperature process chamber is provided with a driving device for driving two substrates to attach with each other. USE - Device for producing roll-to-roll graphene film on substrate. ADVANTAGE - The roll-to-roll graphene film production device solves the problem of low efficiency when the substrate containing graphene film is transferred and etched by the current technology. The process gas supplied by the air supply unit to the high temperature process cavity also enters the air collecting pipe, so that the newly added process gas (especially carbon source gas) can accurately blow to the substrate, thus the substrate can be used for receiving the process gas to grow out high quality of graphene film. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for producing a graphene film. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of the roll-to-roll graphene film production device. 1High temperature process chamber 3Air supply pipe 4Heating device 7Driving fan 8Air collecting pipe 9Air outlet pipe 10Motor