• 专利标题:   A discrete graphene nanodisk as the charge storage layer for manufacturing method and memory application.
  • 专利号:   TW201406647-A, TW499555-B1
  • 发明人:   LIN C, WANG J, LAI C, CHAN C, LIN C T, WANG J C, LAI C S, CHAN C F
  • 专利权人:   UNIV CHANG GUNG
  • 国际专利分类:   B82Y010/00, B82Y040/00
  • 专利详细信息:   TW201406647-A 16 Feb 2014 B82Y-040/00 201432 Pages: 29 Chinese
  • 申请详细信息:   TW201406647-A TW129526 15 Aug 2012
  • 优先权号:   TW129526

▎ 摘  要

NOVELTY - The present invention discloses a charge storing film applied for a memory, and the memory comprises a substrate. The charge storing film at least comprises a tunneling oxide layer, a charge storing layer and a blocking oxide layer. The tunneling oxide layer is disposed on the substrate. The charge storing layer comprises a plurality of graphene nanocrystals and the graphene nanocrystals are disposed on the tunneling oxide layer. The blocking oxide layer is then formed to cover the charge storing layer. The present invention also discloses the method for manufacturing the abovementioned charge storing film and the structure of the memory.