• 专利标题:   Manufacturing single step thin film transistor, comprises preparing ink including graphene oxide or reduced graphene oxide dispersed solution; forming pattern on substrate; and forming semiconductor channel, and source and drain electrodes.
  • 专利号:   KR1424603-B1, US2015072482-A1, US9064778-B2
  • 发明人:   LIM J A, SONG Y W, HONG J M, CHOI W K, EOM D S, SONG Y, HONG J, CHOI W
  • 专利权人:   KOREA INST SCI TECHNOLOGY
  • 国际专利分类:   H01L021/336, H01L029/786, H01L021/02, H01L029/16, H01L029/66, H01L029/43, H01L029/45, H01L029/49
  • 专利详细信息:   KR1424603-B1 04 Aug 2014 H01L-029/786 201457 Pages: 21
  • 申请详细信息:   KR1424603-B1 KR108576 10 Sep 2013
  • 优先权号:   KR108576

▎ 摘  要

NOVELTY - Manufacturing single step thin film transistor, comprises preparing ink including graphene oxide and/or reduced graphene oxide dispersed solution; forming a pattern on a substrate; and forming a semiconductor channel formed between a source electrode and a drain electrode, which are located at the edge of the pattern by coffee ring effect, where the pattern is formed with graphene oxide and/or reduced graphene oxide. USE - The method is useful for manufacturing single step thin film transistor (claimed). ADVANTAGE - The method is simple and environmentally friendly without requiring photolithography and masking processes, does not require photosensitive liquid and etching solution, and provides material effectiveness unlike traditional spin-coating method.