▎ 摘　　要

NOVELTY - The utility model belongs to nano-structure film material preparation technology field, claims a CVD method preparing graphene and carbon nano-tube vacuum vapour deposition apparatus, comprising a reaction chamber of the deposition system, water cooling system, air cooling system, electrode control system and a gas control system, water cooling system is composed of a copper pipe, a cooling circulating water and cooling water pipe, self-cooling system by the cooling air cover and the cooler; the electrode control system is composed of a resistance wire heating plate, two stainless steel supporting frames and two insulating mica meeting the condition; electrode control system is composed of a resistance wire heating plate, two stainless steel support frame and two insulating mica; gas control system by a gas mass flow meter are arranged in sequence of the hydrogen generator, argon gas, methane gas, hydrogen gas bottle. The utility model meets the condition of the resistance wire heating plate, stainless steel and insulating isolation element, reduces the original device of the temperature limit.