▎ 摘　　要

NOVELTY - The sensor has a substrate (1) formed with an annular groove and a rectangular lug boss. An upper surface of the substrate is covered with a first insulating layer (3). A sensitive mass plate (2) is etched to form a sensitive mass block, a U-type thin plate structure supporting beam and a graphene beam placing groove. A graphene beam is placed on a surface of the graphene beam placing groove that is covered by a second insulating layer (4) and a third insulating layer (8). The sensitive mass plate is fixed on an inner side of an upper groove to seal a sensor main body. USE - Differential graphene resonant beam acceleration sensor. ADVANTAGE - The sensor realizes differential mode graphene resonant beam sensitive quality block operating process so as to improve detecting signal sensitivity and detecting signal measurement accuracy by suppressing conjugated interference. DESCRIPTION OF DRAWING(S) - The drawing shows a top perspective view of a differential graphene resonant beam acceleration sensor. Substrate (1) Sensitive mass plate (2) Insulating layers (3, 4, 8)