• 专利标题:   Method for preparing FET e.g. junction FET, involves providing interdigital electrode on graphene nanoribbon composite structure, where electrode covers set of protrusions and is electrically connected to set of graphene nano-ribbons.
  • 专利号:   TW762149-B1, US2022181476-A1, TW202224024-A
  • 发明人:   ZHANG T, ZHANG L, JIN Y, LI Q, FAN S
  • 专利权人:   HON HAI PRECISION IND CO LTD, HON HAI PRECISION IND CO LTD, UNIV TSINGHUA
  • 国际专利分类:   B82Y010/00, B82Y030/00, B82Y040/00, C01B032/182, H01L021/335, H01L029/06, H01L029/16, H01L029/66, H01L029/772, H01L021/02, H01L021/04, H01L021/78, H01L029/417, H01L029/423, H01L029/76, H01L029/786
  • 专利详细信息:   TW762149-B1 21 Apr 2022 H01L-021/335 202257 Pages: 36 Chinese
  • 申请详细信息:   TW762149-B1 TW100893 08 Jan 2021
  • 优先权号:   CN11447911

▎ 摘  要

NOVELTY - A method for making a field effect transistor includes the following steps: providing a graphene nanoribbon composite structure including a substrate and a plurality of graphene nanoribbons, wherein the substrate includes a plurality of protrusions spaced apart from each other, the plurality of graphene nanoribbons are spaced on the substrate, and one graphene nanoribbon is located between two adjacent protrusions; and providing an interdigital electrode on the graphene nanoribbon composite structure, wherein the interdigital electrode covers the plurality of protrusions and is electrically connected to the plurality of graphene nanoribbons.