• 专利标题:   Fabricating biological field-effect transistor, by preparing carbonaceous dispersion by adding three-dimensional graphene into solvent, depositing dispersion onto e.g. p-type silicon wafer, forming source and drain terminals, removing photoresist and biofunctionalizing dispersion with element.
  • 专利号:   US2021396709-A1
  • 发明人:   LARSEN G R, TARSIA M, DANIELSON E L, LIM S H
  • 专利权人:   LYTEN INC
  • 国际专利分类:   H01L029/16, H01L029/66, G01N027/414
  • 专利详细信息:   US2021396709-A1 23 Dec 2021 G01N-027/414 202210 English
  • 申请详细信息:   US2021396709-A1 US382661 22 Jul 2021
  • 优先权号:   US042808P, US382661

▎ 摘  要

NOVELTY - Method of fabricating biological field-effect transistor (BioFET) involves preparing carbonaceous dispersion by adding three-dimensional (3D) graphene into a solvent, depositing the carbonaceous dispersion onto a p-type silicon wafer, spin-coating a positive photoresist over the carbonaceous dispersion, forming source and drain terminals on the p-type silicon wafer, the source and drain terminals in contact with the 3D graphene of the carbonaceous dispersion, removing residual photoresist from the carbonaceous dispersion by placing the p-type silicon wafer in 1-methyl-2-pyrrolidone (NMP), and biofunctionalizing the carbonaceous dispersion with a molecular recognition element configured to alter one or more electrical properties of the Bio-FET in response to exposure of the molecular recognition element to the analyte. USE - The method is useful for fabricating BioFET or detecting harmful analytes. ADVANTAGE - The method and accurately detects the presence and concentration levels of analytes. The BioFET exhibits adverse ionic screening effects at physiologically relevant conditions. The pristine 3D graphene provides an improved surface area to volume ratio without suffering impediments resulting from impurities residing on exposed carbonaceous surfaces of the pristine 3D graphene.