▎ 摘　　要

NOVELTY - the air inlet device and graphene growth of this utility model provides a vacuum high temperature furnace for graphene growth of high temperature vacuum furnace, said air inlet device comprises an air inlet pipe and an air outlet device, the air inlet pipe and the air outlet device is connected hermetically, said air outlet device is a hollow box body, the surface of box body is provided with multiple air outlet holes. the graphene growth of high temperature vacuum furnace comprises the air inlet device and the furnace wall, the air inlet device is set in the high temperature vacuum furnace, an air inlet pipe passes through the furnace wall of the air inlet device for inputting reaction gas to the intake device. said air inlet device from the transverse and longitudinal with uniformly gas through multi-layer graphene growth substrate, using the air inlet device and the high temperature vacuum furnace, realize the factory mass production of graphene of high quality, high density and large area.