• 专利标题:   Cleaning of graphene-growing quartz tube furnace involves heating graphene-growing quartz tube furnace, supplying oxygen, depositing kaolin and ferric nitrate to inner wall of quartz tube and purging nitrogen.
  • 专利号:   CN104630739-A, CN104630739-B
  • 发明人:   LI Z, SHI H, XU X, ZHONG D, YU B
  • 专利权人:   CHONGQING MOXI TECHNOLOGY CO LTD, CHINESE ACAD SCI CHONGQING GREEN INTEL, CHINESE ACAD SCI CHONGQING GREEN INTEL, CHONGQING GRAPHENE TECH CO LTD
  • 国际专利分类:   C23C016/26, C23C016/44
  • 专利详细信息:   CN104630739-A 20 May 2015 C23C-016/26 201557 Pages: 6 Chinese
  • 申请详细信息:   CN104630739-A CN10083034 15 Feb 2015
  • 优先权号:   CN10083034

▎ 摘  要

NOVELTY - A graphene-growing quartz tube furnace is heated at 600-900 degrees C, and oxygen is supplied to graphene-growing quartz tube furnace for 1-2 hours. When graphene-growing quartz tube furnace reaches room temperature, kaolin and ferric nitrate are deposited to inner wall of quartz tube until quartz tube inside wall at attachment is disappeared. The kaolin quartz tube is removed, and quartz tube cavity is cleaned with alcohol. When the visual inspection of quartz tube has no residue, the quartz tube is purged with nitrogen. Thus, the graphene-growing quartz tube furnace is cleaned. USE - Cleaning of graphene-growing quartz tube furnace (claimed). ADVANTAGE - The method enables economical cleaning of graphene-growing quartz tube furnace, with reduced oxygen fuel consumption, without washing machine requirement and dismantling component of quartz tube furnace and within short period of time.