• 专利标题:   Manufacture of n-doped graphene used for manufacturing electrical components, involves exposing graphene to ammonium fluoride, leading to formation of fluorine layer on portion of surface of graphene layers.
  • 专利号:   US2015280011-A1, KR2015111668-A, CN104952712-A, TW201603122-A, US9472675-B2, KR1687983-B1, CN104952712-B, TW631604-B1
  • 发明人:   BONG J H, CHO B J, SUL O, YOON H A, ALEXANDER Y H, SUL W J, CAO B, FENG Z, XUE W, CHO B, BONG J
  • 专利权人:   LAM RES CORP, KOREA ADVANCED INST SCI TECHNOLOGY, LAM RES CORP, KOREA ADVANCED INST SCI TECHNOLOGY, KOREA INST SCI TECHNOLOGY, LAM RES CORP, LAM RES CORP, KOREA ADVANCED INST SCI TECHNOLOGY
  • 国际专利分类:   H01L021/22, H01L021/228, H01L029/786, C01B031/04, H01L029/78, H01L029/167, H01L029/772, H01L029/16, C01B032/194, C01B032/20
  • 专利详细信息:   US2015280011-A1 01 Oct 2015 H01L-029/786 201569 Pages: 12 English
  • 申请详细信息:   US2015280011-A1 US256895 18 Apr 2014
  • 优先权号:   KR035302, US256895

▎ 摘  要

NOVELTY - Manufacture of n-doped graphene (410) involves preparing graphene, and ammonium fluoride, exposing graphene to ammonium fluoride leading to formation of fluorine layer on a portion or all of the upper and lower surfaces of graphene layer. The ammonium ions are physisorbed on a portion or all of the upper and lower surfaces of the graphene layer or defects between carbon atoms of the graphene layer. USE - Manufacture of n-doped graphene used for manufacturing electrical components (all claimed) e.g. field effect transistor. ADVANTAGE - The method enables manufacture of n-doped graphene having improved charge mobility. The electronic component having improved operating speed or frequency and suppressing deterioration of graphene properties is provided. The protective film on the surface of graphene enables the doping effect of graphene to be maintained for a long period of time. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for manufacture of electrical component. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of back-gate transistor using graphene and its doping process. Back-gate transistor (400) Graphene (410) Silicone-nitride layer (440) Doped silicone layer (450) Aluminum oxide layer (460)