▎ 摘　　要

NOVELTY - Forming graphene layer involves exposing a substrate surface comprising a dielectric material to a microwave surface-wave plasma comprising hydrocarbon and hydrogen radicals to form a graphene layer. USE - Method for forming graphene layer for improving graphene deposition. ADVANTAGE - The method enables to form graphene layer at lower temperature and formed graphene layers has a predetermined thickness in a shorter period of time with lower resistance, and provides plasma which has high radical density but low energy. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method of improving graphene deposition, involves exposing a substrate surface to an oxygenating plasma to improve one or more substrate surface quality or deposition parameter.