▎ 摘　　要

NOVELTY - The method involves directly writing and etching the surface of the flexible substrate in the way of laser direct writing to obtain the patterned laser-induced graphene structure. The three-dimensional insulating mask plate (4) is clamped. The selective electrochemical deposition material is used to electrochemically deposition on the heating pattern region to obtain an electrode and the interconnection conductor pattern. The flexible polymer is packaged as the packaging layer to finish the manufacturing of a flexible microheater. USE - Composite processing method for flexibly customizing high adjustable flexible micro-heater (claimed) used for various fields of limited space. Uses include but are not limited to portable biological medical device, laboratory research, wearable electronic device, soft robot and military field. ADVANTAGE - The method provides a low processessing cost, high precision and controllable technique operation of new composite processing preparation method, which can realize light and thin. The large scale of the flexible micro-heater is heated with high temperature, for customized manufacturing. The processing technique process is convenient to operate, green and environment-friendly, and high processing precision. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of the flexible micro-heater. Flexible micro-heater integral structure (1) Insulating film substrate (2) Laser induced graphene pattern layer (3) Insulating mask plate (4)