• 专利标题:   Hybrid bonding structure for manufacturing semiconductor device for electronic device, comprises solder ball and solder paste bonded to solder ball, where solder paste includes transient liquid phase including core and shell on surface of core.
  • 专利号:   EP3974096-A1
  • 发明人:   CHU K, SONG B, LEE J
  • 专利权人:   SAMSUNG ELECTRONICS CO LTD
  • 国际专利分类:   B23K020/02, B23K020/233, B23K035/02, B23K035/22, B23K035/26, B23K035/30, H01L023/00
  • 专利详细信息:   EP3974096-A1 30 Mar 2022 B23K-035/02 202228 Pages: 31 English
  • 申请详细信息:   EP3974096-A1 EP195683 09 Sep 2021
  • 优先权号:   KR023317

▎ 摘  要

NOVELTY - Hybrid bonding structure comprises a solder ball, and a solder paste bonded to solder ball, where the solder paste comprises a transient liquid phase, the transient liquid phase comprises a core and a housing on a surface of the core, the melting point of housing is lower than a melting point of the core, and the core and housing are configured to form an intermetallic compound in response to the transient liquid phase at least partially being at a temperature of 20-190 degrees C. USE - The hybrid bonding structure is useful in a semiconductor device, which is used in electronic device (claimed), preferably memory semiconductor package or module used in data server, mobile or laptop computer. ADVANTAGE - The hybrid bonding structure is configured to bond at a low temperature. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) a solder paste composition comprising a core, and a housing on a surface of the core, where the melting point of housing is lower than a melting point of core, the core and housing are configured to form an intermetallic compound in response to solder paste composition at least partially being at a temperature of 20-190 degrees C; (2) a semiconductor device comprising a circuit board, a semiconductor chip, and the hybrid bonding structure between circuit board and semiconductor chip; and (3) a method of manufacturing the semiconductor device, involving forming semiconductor chip, arranging solder ball on the semiconductor chip, applying solder paste to circuit board, where the solder paste comprises a flux and a transient liquid phase, the transient liquid phase comprises core and housing, positioning the solder ball to face the solder paste, melting the housing at 20-190 degrees C to form intermetallic compound between housing and core, and bonding the semiconductor chip to circuit board.