▎ 摘 要
NOVELTY - Preparation of graphene/carbon nanotube composite film, involves electrochemically depositing a graphene film on the surface of a metal substrate, depositing a carbon nanotube film on the surface of graphene film by atomic layer deposition, removing the metal substrate using a removal agent, and cleaning. USE - Preparation of graphene/carbon nanotube composite film for thin film transistor arrays (all claimed). ADVANTAGE - The method forms composite films having high charge mobility, conductivity, and light transmittance, and excellent chemical stability and mechanical performance. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for thin film transistor array comprising a substrate and a gate metal layer, a gate insulating layer, an amorphous silicon active layer, an ohmic contact layer, and a source/drain metal layer sequentially formed on the surface of a substrate, a passivation layer, and the graphene/carbon nanotube composite film layer, which at least partially passes through the passivation layer and is connected with the source-drain metal layer.