▎ 摘 要
NOVELTY - The utility model claims a T-shaped Slot optical waveguide graphene surface plasma modulator structure, comprising a T-shaped slot optical waveguide structure, a double-layer graphene and a metal electrode, T-shaped slot optical waveguide structure is composed of a substrate layer, a strip-shaped metal waveguide and a Slot nano-slit. horizontal Slot nano-slit and vertical Slot nano-slit of Slot nano-slit can realize respectively-wavelength local binding of TE mode and TM mode, enhancing interaction of graphene and electromagnetic field, improving the electro-optical modulation depth and modulation rate. The utility model optimizes the T-shaped slot optical waveguide characteristic parameter, synchronous tuning TE and TM mode loss, so as to finish the polarization insensitive electro-optical modulation. The double-layer graphene and the metal electrode contact of opening and closing the light modulator under the excitation of the external bias voltage. The utility model provides important technical idea for the design of polarization diversified integrated device and chip.